Pyrolytic Boron Nitride (PBN) Nozzle | Flanged & Insulating

Advanced Gas Injection for Vacuum and Plasma Systems

In semiconductor epitaxy systems such as MOCVD and Molecular Beam Epitaxy (MBE), equipment engineers often face challenges with gas condensation at the nozzle tip or arcing in plasma environments. To maintain process stability, relying on a high-purity PBN nozzle is essential. Upgrading to a Pyrolytic Boron Nitride nozzle resolves critical pain points related to contamination, insulation, and thermal management.

1. Zero Outgassing in UHV Environments

Many traditional ceramic nozzles contain binders that outgas at high temperatures, contaminating the vacuum chamber. Telite Ceramics addresses this by utilizing a specialized Chemical Vapor Deposition (CVD) process. Every CVD boron nitride component guarantees a purity of ≥99.99%, entirely free of binders. This ensures zero outgassing even when operating at temperatures up to 1500°C.

2. Preventing Nozzle Tip Condensation and Clogging

When reactive gases enter a hot chamber, cold spots at the nozzle tip can cause gas condensation and subsequent clogging. Because PBN possesses unique thermal anisotropy, heat is rapidly conducted along the material, maintaining a uniform temperature profile down to the tip. This makes it an exceptionally reliable MBE gas injector, effectively preventing deposition build-up and ensuring consistent flow rates.

3. Complex Machining and Electrical Insulation

Beyond gas injection, these components often serve crucial structural and electrical isolation roles. With PBN’s excellent dielectric strength, it prevents arcing in plasma and ion sputtering applications. Utilizing advanced CNC machining, Telite Ceramics can deliver a custom PBN insulating nozzle with complex features, including integrated flanges, conical shapes, micro-holes, and blind caps.