In high-density plasma processing, maintaining the integrity of sensitive chamber components is a primary concern. Telite Ceramics engineers the Semiconductor ceramic shield ring to act as a high-performance dielectric barrier. These components are specifically designed to withstand ion bombardment and corrosive etch gases, ensuring long-term process stability in CVD, PVD, and Etch tools.
1. Durable Alumina plasma shield ring Options
Our Alumina plasma shield ring solutions are manufactured from high-purity industrial alumina. The 99% alumina grade provides the maximum erosion resistance required for halogen-based plasmas. For applications where mechanical toughness is the priority, our 95% Alumina High purity ceramic insulator parts offer a balanced solution for structural shielding and electrical isolation.
2. Advanced Composite Material Specifications
Utilizing the data from our latest 2025 performance metrics, we offer specialized composite grades for the Semiconductor ceramic shield ring that outperform monolithic ceramics in extreme conditions: [cite: 1]
| Composite Grade | Primary Composition | Thermal Cond. (W/m·K) | Flexural Strength | Max Temp (Inert) |
|---|---|---|---|---|
| TLT-BN-WE-SC | BN + SiC | 45 | 85 MPa | $1800^{\circ}C$ |
| TLT-BN-THUS AN | BN + AlN | 85 | 120 MPa | $1800^{\circ}C$ |
| TLT-BM-57220-SM | BN + SiN | 85 | 220 MPa | $1800^{\circ}C$ |
[cite: 1]
3. Precision Vacuum ceramic shield component Machining
As a leading manufacturer, Telite ensures that every Vacuum ceramic shield component is machined via multi-axis CNC diamond grinding. We achieve tolerances of ±0.01mm, ensuring a hermetic fit and perfect alignment within your OEM equipment. The ultra-low outgassing rates of our Composite BN shield ring materials are essential for maintaining the integrity of UHV (Ultra-High Vacuum) atmospheres.
4. Application & Custom Material Ratios
The Semiconductor ceramic shield ring is a critical part of modern fabrication lines. Whether you require a standard Alumina plasma shield ring or a custom-ratio High purity ceramic insulator to match a specific coefficient of thermal expansion (CTE), our engineering team provides the technical support to optimize your tool uptime and yield.
For further technical details on the properties of industrial ceramics and their applications in vacuum engineering, please consult the resource: Ceramic Insulation & Materials.
Technical Support: Mr. Zhang | Direct/WeChat: +86-18602175437 | Email: telice@teliceramic.com
Expertise: Semiconductor ceramic shield ring, Alumina plasma shield ring, Vacuum ceramic shield component, Composite BN shield ring, High purity ceramic insulator.
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